====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+04 A   Layer # 1- Density = 6.406E22 atoms/cm3 = 10.20 g/cm3
  Layer # 1- Mo = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   119.7E+02 A   Straggling =   242.6E+01 A
 Ion Lateral Range =   248.9E+01 A   Straggling =   308.7E+01 A
 Ion Radial  Range =   394.4E+01 A   Straggling =   193.2E+01 A
====================================================================
 Range Skewne- = -001.0799  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 005.0360  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
200010.E-03  5.0000E+02  0.0000E+00
400010.E-03  0.0000E+00  0.0000E+00
600010.E-03  5.0000E+02  0.0000E+00
800010.E-03  0.0000E+00  0.0000E+00
100001.E-02  5.0000E+02  0.0000E+00
120001.E-02  0.0000E+00  0.0000E+00
140001.E-02  0.0000E+00  0.0000E+00
160001.E-02  0.0000E+00  0.0000E+00
180001.E-02  0.0000E+00  0.0000E+00
200001.E-02  5.0000E+02  0.0000E+00
220001.E-02  0.0000E+00  0.0000E+00
240001.E-02  0.0000E+00  0.0000E+00
260001.E-02  0.0000E+00  0.0000E+00
280001.E-02  5.0000E+02  0.0000E+00
300001.E-02  5.0000E+02  0.0000E+00
320001.E-02  0.0000E+00  0.0000E+00
340001.E-02  0.0000E+00  0.0000E+00
360001.E-02  5.0000E+02  0.0000E+00
380001.E-02  1.5000E+03  0.0000E+00
400001.E-02  0.0000E+00  0.0000E+00
420001.E-02  5.0000E+02  0.0000E+00
440001.E-02  0.0000E+00  0.0000E+00
460001.E-02  0.0000E+00  0.0000E+00
480001.E-02  1.0000E+03  0.0000E+00
500001.E-02  0.0000E+00  0.0000E+00
520001.E-02  0.0000E+00  0.0000E+00
540001.E-02  2.0000E+03  0.0000E+00
560001.E-02  1.5000E+03  0.0000E+00
580001.E-02  1.5000E+03  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
620001.E-02  1.5000E+03  0.0000E+00
640001.E-02  2.0000E+03  0.0000E+00
660001.E-02  1.5000E+03  0.0000E+00
680001.E-02  1.0000E+03  0.0000E+00
700001.E-02  2.5000E+03  0.0000E+00
720001.E-02  1.0000E+03  0.0000E+00
740001.E-02  2.0000E+03  0.0000E+00
760001.E-02  4.5000E+03  0.0000E+00
780001.E-02  1.0000E+03  0.0000E+00
800001.E-02  3.0000E+03  0.0000E+00
820001.E-02  4.5000E+03  0.0000E+00
840001.E-02  2.0000E+03  0.0000E+00
860001.E-02  5.5000E+03  0.0000E+00
880001.E-02  5.5000E+03  0.0000E+00
900001.E-02  8.5000E+03  0.0000E+00
920001.E-02  3.5000E+03  0.0000E+00
940001.E-02  3.5000E+03  0.0000E+00
960001.E-02  6.0000E+03  0.0000E+00
980001.E-02  7.5000E+03  0.0000E+00
100000.E-01  1.0500E+04  0.0000E+00
102000.E-01  9.0000E+03  0.0000E+00
104000.E-01  7.0000E+03  0.0000E+00
106000.E-01  1.6000E+04  0.0000E+00
108000.E-01  1.3000E+04  0.0000E+00
110000.E-01  1.4000E+04  0.0000E+00
112000.E-01  1.4000E+04  0.0000E+00
114000.E-01  1.8500E+04  0.0000E+00
116000.E-01  9.0000E+03  0.0000E+00
118000.E-01  1.5000E+04  0.0000E+00
120000.E-01  1.9000E+04  0.0000E+00
122000.E-01  1.6000E+04  0.0000E+00
124000.E-01  1.7000E+04  0.0000E+00
126000.E-01  1.8000E+04  0.0000E+00
128000.E-01  1.8000E+04  0.0000E+00
130000.E-01  1.5500E+04  0.0000E+00
132000.E-01  2.0500E+04  0.0000E+00
134000.E-01  2.0000E+04  0.0000E+00
136000.E-01  2.0000E+04  0.0000E+00
138000.E-01  2.1500E+04  0.0000E+00
140000.E-01  1.6000E+04  0.0000E+00
142000.E-01  1.2000E+04  0.0000E+00
144000.E-01  1.5000E+04  0.0000E+00
146000.E-01  8.0000E+03  0.0000E+00
148000.E-01  1.3000E+04  0.0000E+00
150000.E-01  1.1500E+04  0.0000E+00
152000.E-01  1.0000E+04  0.0000E+00
154000.E-01  8.5000E+03  0.0000E+00
156000.E-01  5.0000E+03  0.0000E+00
158000.E-01  3.5000E+03  0.0000E+00
160000.E-01  2.5000E+03  0.0000E+00
162000.E-01  2.5000E+03  0.0000E+00
164000.E-01  2.5000E+03  0.0000E+00
166000.E-01  0.0000E+00  0.0000E+00
168000.E-01  5.0000E+02  0.0000E+00
170000.E-01  0.0000E+00  0.0000E+00
172000.E-01  0.0000E+00  0.0000E+00
174000.E-01  0.0000E+00  0.0000E+00
176000.E-01  0.0000E+00  0.0000E+00
178000.E-01  0.0000E+00  0.0000E+00
180000.E-01  0.0000E+00  0.0000E+00
182000.E-01  0.0000E+00  0.0000E+00
184000.E-01  0.0000E+00  0.0000E+00
186000.E-01  0.0000E+00  0.0000E+00
188000.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192000.E-01  0.0000E+00  0.0000E+00
194000.E-01  0.0000E+00  0.0000E+00
196000.E-01  0.0000E+00  0.0000E+00
198000.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
